Polymère silicone de structure-support, composition de résine et film sec photodurcissable

Silicone Structure-Bearing Polymer, Resin Composition, and Photo-Curable Dry Film

Polymer mit Silikonstruktur, Harzzusammensetzung und lichthärtbarer Trockenfilm

Abstract

A silicone structure-bearing polymer having a crosslinking group within the molecule, containing an isocyanurate structure bonded within the molecule, and having a Mw of 3,000-500,000 is provided. The polymer overcomes the stripping problem that a coating is stripped from metal wirings of Cu or Al, electrodes, and SiN substrates.

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Cited By (5)

    Publication numberPublication dateAssigneeTitle
    CN-105384938-AMarch 09, 2016杭州宝明新材料科技有限公司Single-component addition type organosilicon and preparation method thereof
    EP-2957955-A1December 23, 2015Shin-Etsu Chemical Co., Ltd.Composition de résine photosensible positive, film sec photodurcissable et son procédé de production, produit stratifié, procédé de formation de motifs et substrat
    EP-3002633-A1April 06, 2016Shin-Etsu Chemical Co., Ltd.Chemically amplified negative resist composition, photo-curable dry film, making method, patterning process, and electric/electronic part-protecting film
    EP-3239211-A1November 01, 2017Shin-Etsu Chemical Co., Ltd.Harzzusammensetzung, harzfolie, verfahren zur herstellung der harzfolie, verfahren zur herstellung eines halbleiterbauelements sowie halbleiterbauelement
    US-9557645-B2January 31, 2017Shin-Etsu Chemical Co., Ltd.Positive photosensitive resin composition, photo-curable dry film and method for producing same, layered product, patterning process, and substrate